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Microsystem Technology and Microrobotics - Sergej Fatikow, Ulrich Rembold - 2010
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Microsystem Technology and Microrobotics
di Sergej Fatikow, Ulrich Rembold
Editore: Springer Berlin Heidelberg
EAN: 9783642082320
ISBN: 3642082327
Pagine: 424
Formato: Paperback
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
di Sergej Fatikow, Ulrich Rembold
Editore: Springer Berlin Heidelberg
EAN: 9783642082320
ISBN: 3642082327
Pagine: 424
Formato: Paperback
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
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